Special micro-distance adjustable compound film deposition system

Congratulations on the successful development of a special micro-distance adjustable compound thin film deposition system, which uses two independent temperature control devices to achieve different gradient temperature requirements; three sets of thermocouples are specially designed to accurately measure the heating up and down The actual temperature between the body and the two; the distance between the upper and lower heating bodies is adjustable, which can provide the best adhesion distance for film deposition; in addition, the system uses infrared lamp heating, the heating speed is extremely fast, and the rapid annealing function can also be achieved .