high vacuum unit with imported pump
high vacuum unit with imported pumpVAU-05
The system is composed of the original oil-free pump, molecular pump, vacuum sensor, electronic control system and LED liquid crystal display imported from Germany. This system is used to suck or compress air and other non-corrosive, insoluble in water, not A gas containing solid particles in order to create a vacuum and pressure in a closed container, and a small amount of liquid is allowed to be mixed into the suction gas. It is widely used in new energy materials, metal materials, magnetic materials, semiconductor materials, ceramic materials, electrochemistry, thin film materials, CVD, PECVD, graphene, silicon nanotubes, nanowires, and other research fields. Since the compression of the gas is isothermal in the working process, it is not likely to be dangerous when compressing and pumping flammable and explosive gases, so it is more widely used.
|molecular pump rate||65 L/s|
|foreline pump rate||0.7 m³/h|
|ultimate pressure||10-7 mbar|
|start time||1.5 min|