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Anhui BEQ Equipment Technology Co., Ltd
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Hefei Oulai Di Optoelectronics Technology Co., Ltd
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Product name
Plasma sputter
Affiliate classification
Ion sputter instrument and wash machine
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Product description
Product parameters
techncial parameter
power
|
AC220V、50/60HZ
|
max. output power
|
100W(300W可以选配)
|
frequency
|
13.56MHZ
|
Coherent mode
|
Manual 2-axis co-synchronization method (optionally automatic)
|
Target material
|
2 inches, thickness up to 5mm
|
Target to substrate distance
|
30mm-100mm
|
Platform rotate speed
|
5r/min
|
chamber
|
Φ195*238 stainless steel
|
gas
|
Ar or N2
|
inlet
|
Φ6
|
Observation window size
|
Φ148
|
overall size
|
560*550*600
|
According to customer requirements, optional (gold, silver, copper or oxide target), pump and chiller 3000 type.
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