TEL:400-0033-603

A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results

Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.

Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center

On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.

Best Group 2018 Highlights

On January 30, 2019, Best Group ’s annual meeting was successfully held!

The Fifth National Energy Storage Science and Technology Conference

From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.

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射频电源150W/300W/500W

Affiliate classification

PECVD System

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Online consultation

Mailbox:beq02@ahbeq.com;besteq@163.com

Telephone:+86 173 5409 7574

Product description

Product parameters

　　本产品属管式可定制PECVD零部件，可承接现有管式炉PECVD设备。

信号频率	13.56 MHz±0.005%
功率输出范围	0W~500W
最大反射功率	100W
射频输出接口	50 Ω, N-type, female
功率稳定度	≤5W
谐波分量	≤-50dbc
供电电压	单相交流（187V-253V）频率50/60HZ
整机效率	>=70%
功率因素	>=90%
冷却方式	强制风冷

小三温区等离子体增强化学气相沉积系统（型号：PECVD-IIIS-500A）

铜铟镓硒太阳能薄膜电池专用炉