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Product name

双炉滑轨PECVD

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Product description
Product parameters

  该PECVD(等离子化学气相沉积系统)系统,有多路质量流量计系统(进口流量计),真空机组(进口真空泵),PE射频电源(进口射频源),温控系统等装置构成。使用PE源将气源等离子化,有利于降低工艺温度,同时扩大工艺的使用条件,满足更多的工艺实验要求,如石墨烯、C纳米管等,控制操作系统集成于触摸屏操作面板上,便于操作与观察。

技术参数:

双温场滑轨炉

主要特点:

滑轨式快速升温炉是专为生长石墨烯研制的石墨烯生长专用炉,也同样适用于要求升降温速度比较快的CVD实验,这款设备是根据开启式真空管式炉改装而来的,操作时可将实验需要的恒定高温直接推到样品处,使样品能得到一个快速的升温速度,同样也可将高温的管式炉直接推离样品处,使样品直接暴露在室温环境下,得到快速的降温速率。

技术参数:

额定功率(KW):4

额定电压(V):AC 208-240V Single Phase,50/60 Hz

最高温度(℃):1200(1 hour)

持续工作温度(℃):1100

最大升& 降温速率(℃/S):≤20

炉管尺寸(mm):高纯石英管Φ50×1900(管径可选)

加热区长度(mm) :230+230

恒温区长度(mm):100+100

控温方式:模糊PID控制和自整定调节,智能化30段可编程控制具有超温和断偶报警功能

控温精度(℃):±1

认证标准:

密封系统:炉管两端配304不锈钢水冷密封法兰(包括精密针阀,指针式真空压力表,法兰进气端配置两个Φ6mm卡套进气口。

净重(Kg):80

射频电源500W

 

信号频率:13.56 MHz±0.005%

功率输出范围:L5W-500W

最大反射功率:200W

射频输出接口:50 Ω, N-type, female

功率稳定度:±0.1%

谐波分量:≤-50dbc

供电电压:单相交流(187V-253V)

频率50/60HZ

整机效率:>=70%

功率因素:>=90%

冷却方式:强制风冷

供气系统

 

工作电压:185~245V 50HZ

最大输出功率:18W

流量计标准量程:100sccm,200sccm,200sccm,500sccm(非特殊指定以氮气标定,量程可选)

工作温度:5~45℃

工作压差:0.1~0.5MPa

最大压力:3MPa

准确度:±1.5% FS

测量范围:-0.1~0.15 MPa(0.01 MPa/grid)

针阀:316不锈钢

混气罐:Φ80×120mm

截止阀:Φ6mm”316不锈钢针阀

尺寸:600×600×650 mm

低真空机组VAU-02

 

空气相对湿度: ≤85%

工作电电压:220V±10%  50~60HZ

功率:500瓦

抽气速率:8m³/h

极限真空:4X10-2Pa

实验真空度:1.0X10-1Pa

容油量: 1.1L

进气口口径:KF25

排气口口径:KF25

转速:1450rpm

噪音:50dB

外型尺寸:600×600×600mm

 

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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