A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Copyright 2017  Anhui BEQ Equipment Technology Co., Ltd.   皖ICP备12002778号-1   Powered by: www.300.cn

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Product name

combined type PECVD with preheater

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Mailbox:beq02@ahbeq.com;besteq@163.com
Telephone:+86 173 5409 7574
Product description
Product parameters

tube furnace

Tube size:ODφ50

Heating element:Fe-Cr-Alloy doped by Mo

Heating zone length:440mm

Constant zone length:200mm(±1℃)

Working temp:1100℃

Max. temp:1200℃

Temp. control:*30 programmable segments for precise control of heating rate ,cooling rate and dwell time.

*Built in PID automatic tune function with overheating&brocken  thermocouple brocken protection and over temperature protection and alarm allows for operation without attendants.

Accuracy:±1℃

Suggest heating rate:20℃/min

voltage:AC220V/50Hz

power:3KW

RF generator

Signal frequency:13.56MHz±0.005%

Power output range:5W-500W

Max. reflection power:200W

RF output interface:5Ω,N-type,female

Power stability:≤5W

gas supply system

MFC

WEIGHT:35kg

SIZE:600*600*650mm

Connector style :Double cutting ferrule stainless steel connector

Standard range(N2)):100sccm、200sccm、500sccm(OPTIONAL)

Accuracy:±1.5%

Linearity:±0.5%~1.5%

RESPONSE TIME:GAS:1~4Sec,ELECTRICICTY:10Sec

Working pressure range:0.1~0.5MPa

Max.pressure:3MPa

Low vacuum unit

Relative air humidity:≤85%

Ultimate pressure:5*10-1(Pa)

size:600*600*650mm

preheater

working temp:350℃

max. temp.:400℃

max. heating rate30℃/min

 

Corresponding parameter set not found, please add it in property template of background
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暂未实现,敬请期待
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