combined type PECVD with preheater

tube furnace

Tube size：ODφ50

Heating element：Fe-Cr-Alloy doped by Mo

Heating zone length：440mm

Constant zone length：200mm（±1℃）

Working temp：1100℃

Max. temp：1200℃

Temp. control：*30 programmable segments for precise control of heating rate ,cooling rate and dwell time.

*Built in PID automatic tune function with overheating&brocken  thermocouple brocken protection and over temperature protection and alarm allows for operation without attendants.

Accuracy：±1℃

Suggest heating rate：20℃/min

voltage：AC220V/50Hz

power：3KW

RF generator

Signal frequency：13.56MHz±0.005%

Power output range：5W-500W

Max. reflection power：200W

RF output interface：5Ω，N-type，female

Power stability：≤5W

gas supply system

MFC

WEIGHT：35kg

SIZE：600*600*650mm

Connector style ：Double cutting ferrule stainless steel connector

Standard range(N2)）:100sccm、200sccm、500sccm(OPTIONAL)

Accuracy：±1.5%

Linearity：±0.5%~1.5%

RESPONSE TIME：GAS：1~4Sec，ELECTRICICTY：10Sec

Working pressure range：0.1~0.5MPa

Max.pressure：3MPa

Low vacuum unit

Relative air humidity:≤85%

Ultimate pressure：5*10^-1（Pa）

size：600*600*650mm

preheater

working temp:350℃

max. temp.:400℃

max. heating rate30℃/min