A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Anhui BEQ Equipment Technology Co., Ltd

Hefei Baisi New Materials Research Institute

Hefei Oulai Di Optoelectronics Technology Co., Ltd


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Product name

CVD system with low vacuum unit (BTF-1500C-3ZL)

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Telephone:+86 173 5409 7574
Product description
Product parameters

  main feature

This CVD system is composed of a multi-channel high-precision mass flow meter, a low vacuum unit, and a 1500 degree high-temperature tube furnace. Its wide

Is widely used in semiconductors, nano materials, carbon fiber, graphene and other new materials and new technology fields.









heating furnace


tube size:Φ 50×700mm

heating element:Silicon carbon rod

heating zone length:160mm
constant zone length:50mm
working temp.:1400℃
max. temp.:1500℃

temp. control:

*30 programmable segments for precise control of heating rate ,cooling rate and dwell time.

      Built in PID auto tune function with overheating&broken  thermocouple broken protection and over temperature protection   

*Alarm allows for operation without attendants


suggested heating rate:below 1400℃≤10℃/min,1400℃ above≤5℃/min
voltage:AC 208-240V Single Phase,50/60 Hz


size: 420×295×520 mm

Sealing system: The two ends of the furnace tube are equipped with stainless steel sealing flanges (including precision needle valves, pointer vacuum pressure gauges and hose-type pagoda nozzle joints)
The port can be expanded according to actual use.

Standard accessories: 1 corundum tube, 1 set of stainless steel sealing flange, 2 sets of fluorine rubber sealing ring, 4 alumina tube plugs, 1 pair of high temperature gloves, 1 crucible hook, 1 small insurance.

Remarks: Tube furnaces with different temperature such as 1200 ℃, 1400 ℃, 1600 ℃, and 1700 ℃ are optional.








Gas supply system


Range ability(N2):100sccm、200sccm、500sccm、1000sccm (optional)


Response time:Gas characteristics:14sec

                           Electrical characteristics:10sec

Pressure differential:0.1~0.5 MPa

max. pressure:3MPa           

Remarks: One-way, two-way, three-way, four-way and other mass flowmeters can be selected.






vacuum unit


pumping rate:10m³/h

ultimate vacuum:5*10-1pa


oil capacity:1.1L



Corresponding parameter set not found, please add it in property template of background
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