A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Anhui BEQ Equipment Technology Co., Ltd

Hefei Baisi New Materials Research Institute

Hefei Oulai Di Optoelectronics Technology Co., Ltd


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CVD equipment for preparing composite oxide hydrogen separation membrane
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Product name

CVD equipment for preparing composite oxide hydrogen separation membrane

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Telephone:+86 173 5409 7574
Product description
Product parameters

  Main feature

 It can realize the chemical deposition of oxide (SiO2, Al2O3, TiO2, ZrO2) and composite oxide (Al2O3-SiO2, SiO2-TiO2, SiO2-ZrO2) hydrogen separation membrane on porous alumina ceramic tubes and ceramic sheets.



  1) The main body heating is a three-stage heating system with a maximum operating temperature of 1000 ℃;

  2) Three liquid sources heat the evaporation bubbler, the maximum temperature is 300 ℃, and the temperature is controlled independently.

  3) The three channles gas inlet, respectively nitrogen, argon and hydrogen, can directly enter the gas mixing chamber and enter the vacuum chamber, and the flow rate can be controlled separately, and the flow meter control accuracy is ± 1.5% F.S. In addition, nitrogen is used as a purge gas, which enters the three liquid sources in parallel through the flowmeter and then enters the gas mixing chamber. Each of the three channels is equipped with a separate valve control.

  4) The ceramic blind tube has a length of 620mm, an outer diameter of 12mm, and an inner diameter of 9mm. From 250mm to 350mm from the open end, it is a deposition section with an aperture of 0.2μm, and the outer walls of the remaining tubes have been glazed;

  5) The sample of the ceramic sheet has a diameter of 30 mm and a thickness of 3 mm. 3 sample stages, each of which can place 3 ceramic samples at the same time.

  6) space as small as possible

  7) Rear vacuum connection system.


  technical parameter

Furnace structure

Open up and down




AC 208-240V Single Phase,50/60 Hz

max. temp.


working temp.


suggested heating rate

0-20 ℃/min

tube material

310S tube

tube size

shaped Φ80*1200mm+Φ25mm

Insulation device

Furnace tubes are equipped with thermal insulation water-cooled flange devices at both ends for easy access

heating zone length


constant zone length


temp. control

l PID automatic control and auto-tune function.

l 30 programmable segments for precise thermal processing.

l Built-in protection for the over-heated and broken thermocouple. 

temp. accuracy


Heating Element

Resistance wire, Fe-Cr-Al Alloy doped by Mo

insulation material

Alumina fiber


Corresponding parameter set not found, please add it in property template of background
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