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Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
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CVD/BTF-1200C-III-S-SL-3ZL
technical parameter
BTF-1200C-III-S-SL-4ZL |
|
size |
750×440×590mm ( furnace)/2000×490×760mm ( furnace+Rail) |
tube size |
Ø50/Ø60/Ø80/Ø100*1850mm(optional) |
heating zone length |
200+200+200mm(600mm) |
constant zone length |
300mm |
working temp. |
1100℃ |
max. temp |
1200摄氏度 |
temp. control |
· PID automatic control and auto-tune function. · 30 programmable segments for precise thermal processing. · Built-in protection for the over-heated and broken thermocouple. |
Temperature Accuracy |
±1℃ |
suggested Heating Rate |
10-20℃/min |
voltage |
AC 208-240V Single Phase,50/60 Hz |
power |
6KW |
gas supply system |
|
overall size |
600x600x650mm |
Connector style |
Double cutting ferrule stainless steel connector |
Standard range(N2) |
100、200、500sccm(optional) |
Accuracy |
±1.5%F.S. |
Linearity |
±0.5~1.5%F.S |
|
|
响应时间 |
gas:1~4 Sec,electricicty:10 Sec |
Working pressure range |
0.1~0.5 MPa |
Max.pressure |
3MPa |
Pressure vacuum gauge |
-0.1~0.15 MPa(0.01 MPa/grid) |
Low vacuum unit |
|
Relative air humidity |
≤85% |
voltage |
220V±10% 50~60HZ |
power |
1KW |
pumping rate |
10m³/h |
ultimate vacuum |
5X10-1Pa |
oil capacity |
1.1L |
Rotation rate
|
1450rpm
|