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Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
Copyright 2017 Anhui BEQ Equipment Technology Co., Ltd. 皖ICP备12002778号-1 Powered by: www.300.cn
Two-dimensional material growth CVD system
Main features:
1)Equipped with a preheating furnace for evaporating solid state sources
2)Uses a slide furnace to achieve rapid heating/cooling and shorten the experiment time.
3)the flange end is sealed by a clamp, which makes the feeding and discharging more convenient.
4)Gas supply system can be configured with several mass flow meters according to the customer's experimental requirements. The flow meter's range can also be selected in different configurations. The vacuum system can also be configured with various vacuum pumps according to customer requirements.
Technical Parameters
|
Preheating Furnace |
|
|
Max. Temp |
400°C |
|
zone length |
100mm |
|
Heating furnace |
|
|
Max. Temp |
1200°C |
|
Power |
2KW (220V) |
|
zone length |
Heating：440mm Constant：200mm |
|
|
l PID automatic control and auto-tune function. l 30 programmable segments for precise thermal processing. l Built-in protection for the over-heated and broken thermocouple. |
|
Heating Elements |
· Resistance wire, Fe-Cr-Al Alloy doped by Mo |
|
Temperature Accuracy |
+/- 1 °C |
|
Processing tube
|
Size：Φ50*1650mm |
|
Gas supply system |
|
|
Connector style |
Double cutting ferrule stainless steel connector |
|
Standard range(N2) |
50sccm、100sccm、200sccm、500sccm； optional |
|
Accuracy |
· ±1.5%FS |
|
Response time |
Gas characteristics：1～4sec Electrical characteristics:10sec |
|
Linearity |
±0.5～1.5% |
|
Working pressure difference range |
0.1～0.5MPa |
|
Max. pressure |
· 3MPa |
|
Pressure vacuum gauge |
－0.1～0.15 MPa, 0.01 MPa/格 |
|
Vacuum unit |
|
|
Relative air humidity |
≤85% |
|
pumping |
10m³/h |
|
vacuum |
10-1Pa |
|
Oil capacity |
1.1L |
|
Rotation rate |
1450rpm |
|
Noise |
50dB |