A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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CVD system with high vacuum unit
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Product name

CVD system with high vacuum unit

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Telephone:+86 173 5409 7574
Product description
Product parameters

  

 tube furnace

 

BTF-1200c can supply vacuum&atmosphere protection environment .

It is easy to installation and dispatch.From the transparent quartz chamber,the state of sintering can be observed.

The tube workpiece is crossed with chamber of resistance wire make the sintering more uniform,the difference of temperature is about 3 ℃.

Pneumatic spring structure make the operator easy to open it.

It is widely used in the semiconductor,nanometer,carbon fibre ,graphene.ect new material and new field.

 

 

Tube size

Φ50 ×1000mm(tube size can be optional)

Heating element

Fe-Cr-Alloy adopted by Mo

Zone length

Heating :440mm   Constant:200mm

 

Temperature controller

*30 programmable segments for precise control of heating rate ,cooling rate and dwell time.

*Built in PID automatic tune function with overheating&brocken  thermocouple brocken protection and over temperature protection and alarm allows for operation without attendants.

Accuracy

±1℃

Suggest heating rate

15℃/min

Dimension

10800*440*590mm

Weight

N:90KG   

Gas-supply system 4 channels MFC       

Net weight

About 35kg

Dimension

600x600x650mm

Connector style

Double cutting ferrule stainless steel connector

Standard range(N2)

50sccm、100sccm、200sccm(optional)

Accuracy

±1.5%

Linearity

±0.5~1.5%

Repeatability precision

±0.2%

Working pressure range

0.1~0.5 MPa

Max.pressure

3MPa

Connector

Φ6,1/4''

Display

LCD touch screen 3 figrues show

Working tem. environment

5~45 High purity gas

Pressure vacuum gauge

-0.1~0.15 MPa(0.01 MPa/grid)

Inter&exter Parabolic ss pipe

Φ6

Globe valve

Φ6

High vacuum unit ,vau-05

Parameter

Ambient tem.

5-32℃

Air humidity

≤85%

Working voltage

AC 220V+/- 10% 50/60HZ

Power

1KW

Overall ultimater vacuum of the system

5.0x10 -5 Pa

Experiemnt vacuum degree

5.0x10 -3Pa

Size

850x600x650mm

 

Equipments

Mechnical pump

Pump rate

4L/S

Oil capacity

1.1L

Motor power

400W

Ultimater pressure

6X10 -2 Pa

 

Molecular pump

Pump rate

100L/S

Ultimater pressure

6x10 -6Pa

Start time

<2min

Rated rtating speed

4300r/min

Cooling

5~32℃:air-cooled

5~40℃:water cooled

 

1)Molecular pump controller

Voltage

220v +/-22V

Start current

≤7A

Input frequency

47~63HZ

Max. Output power

≤150W

Max. Acceleration voltage

≤40V

Accelerate time

≤3min

Frequency(double)

High speed:705HZ+/-10HZ

Low speed:430HZ+/-5HZ

 

Composite vacuum gauge

Measurement channel

2(Resistance gauge,ionization gauge)

Operating mode

Manual/automatic

 

Resistance gauge

Ionization gauge

model

ZJ-52T

model

ZJ-27

Measure range

1.0x105~1.0x10 -1 Pa

Measure range

5.0~1.0x10 -5Pa

Effective range

2.5x103~5.0x10 -1Pa

Effective range

1.0~5.0x10 -5Pa

Control range

2.5x103~5.0x10 -1Pa

Control range

1.0~5.0x10 -5Pa

 

 

Degassing

joule

 

Other parameter

Control channel

4

Control way

Jogging or reginal control/with power down mempry

Control accuracy

+/- 1%

Sampling time

1S

Power supply

220V+/-10%  50HZ

Power consuption

50W

Ambient tem.

0~45℃

Humidity

≤85%

 

connection pipe

Use stainless steel,electric polishing,parts welding leakage rate:better than 1.0x10-9Pa.m3/s

 

 

 

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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