TEL:400-0033-603
2
1
Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
Copyright 2017 Anhui BEQ Equipment Technology Co., Ltd. 皖ICP备12002778号-1 Powered by: www.300.cn
1700 degree high temperature CVD BTF-1700C-CVD
Technical Parameter:
|
1700C High Temperature Tube Furnace BTF-1700C |
|
|
Power |
5.2KW |
|
Voltage |
AC 220V,50/60HZ |
|
Temperature |
Max.temperature 1700ºC(1 hour) Working temperature ≤1600 ºC |
|
Suggested heating rate |
5°C / min from 1400°C -1600℃;10°C/min below 1400°C |
|
Tube size |
O.D60*1000mm(optional) |
|
Heating zone length Constant zone length |
300mm 150mm |
|
Temperature control |
*30 programmable segments for precise control of heating rate ,cooling rate and dwell time. *Built in PID auto tune function with overheating&broken thermocouple broken protection and over temperature protection *Alarm allows for operation without attendants |
|
Temperature accuracy |
±1℃ |
|
Heating element |
MoSi2 rods |
|
Thermocouple |
B type |
|
4Channela Mass Flowmeter Control, GMF-4Z |
|
|
Net weight |
About 40kg |
|
Range ability |
100 ,200,200,500SCCM(standard gas is N2,range ability can be chose) |
|
Working environment |
5-45℃ |
|
Pressure differential |
0.1~0.5 MPa |
|
Max.pressure |
3MPa |
|
Mixing tank |
φ80*140mm |
|
Accuracy |
±1.5% FS |
|
Low Vacuum Unit,VAU-02 |
|
|
Relative air humidity |
≤85% |
|
Working voltage |
220V±10% 50~60HZ |
|
Power |
1KW |
|
Air bleed rate |
8m³/h |
|
Max.vacuum lever |
4X10-2Pa |
|
Experiment vacuum |
1.0X10-1Pa |
|
Oil capacity |
1.1L |
|
Inlet&Outlet port |
KF25 |
|
Rotation rate |
1450rpm |
|
Noise |
50dB |