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Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
Copyright 2017 Anhui BEQ Equipment Technology Co., Ltd. 皖ICP备12002778号-1 Powered by: www.300.cn
CVD with sliding furnace for graphene production（型号：BTF-1200C-SL-CVD）
1200℃ CVD System With Sliding Tube Furnace,3Channels MFC and low vacuum unit
Main features:
1.BTF-1200C-SL sliding RTP furnace is developed from the split furnace.
2..It can be used for graphene-growing or CVD system for the experiment of the RTP requirement
3.You can put the constant temperature zone to the field of sample or push the high-temperature zone away from
the sample to accelerate the process of heating &cooling.
Technical Parameter:
|
1200℃ Sliding Tube Furnace BTF-1200C-SL |
|
|
Power |
3KW |
|
Voltage |
AC 220V,50/60HZ |
|
Temperature |
Max.temperature 1200ºC(1 hour) |
|
Suggested heating rate |
≤15℃/min |
|
Tube size |
High purity quartz tube O.D60*1200mm(optional) Two fibrous ceramic tube blocks are included for blocking heat radiation generated from tube center. (Ceramic blocks must be fully inserted into the furnace chamber before heating). |
|
Heating zone length Constant zone length |
440mm 200mm |
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Temperature control |
*30 programmable segments for precise control of heating rate ,cooling rate and dwell time. *Built in PID auto tune function with overheating&broken thermocouple broken protection and over temperature protection *Alarm allows for operation without attendants. |
|
Temperature accuracy |
±1℃ |
|
Heating element |
Fe-Cr-Al Alloy doped by Mo |
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Thermocouple |
K type |
|
Standard accessories |
quartz tube 1 piece,stainless steel sealing flange 1set,silicon sealing ring2sets,high temperature glove1pair,quartz block 2pieces.furnace hook 1piece |
|
Optional accessories |
quartz crucible,quartz hook ,manual baffle valve,bellow pipe,vacuum gauge ,vacuum gauge and crucible hook |
|
Size |
620*450*530mm |
|
Net weight |
52KG |
|
3 Channels Mass Flowmeter Control GMF-3Z |
|
|
Net weight |
About 40kg |
|
Range ability |
100 ,200,500SCCM(standard gas is N2,range ability can be chose) |
|
Working environment |
5-45℃ |
|
Pressure differential |
0.1~0.5 MPa |
|
Max.pressure |
3MPa |
|
Mixing tank |
φ80*140mm |
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Accuracy |
±1.5% FS |
|
Low Vacuum Unit |
|
|
Relative air humidity |
≤85% |
|
Working voltage |
220V±10% 50~60HZ |
|
Power |
1KW |
|
Air bleed rate |
8m³/h |
|
Max.vacuum lever |
4X10-2Pa |
|
Experiment vacuum |
1.0X10-1Pa |
|
Oil capacity |
1.1L |
|
Inlet&Outlet port |
KF25 |
|
Rotation rate |
1450rpm |
|
Noise |
50dB |
|
Dimension |
600×600×600mm |