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CVD with sliding furnace for graphene production(型号:BTF-1200C-SL-CVD)
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Product name

CVD with sliding furnace for graphene production(型号:BTF-1200C-SL-CVD)

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Mailbox:beq02@ahbeq.com;besteq@163.com
Telephone:+86 173 5409 7574
Product description
Product parameters

  1200℃ CVD System With Sliding Tube Furnace,3Channels MFC and low vacuum unit       

Main features:

1.BTF-1200C-SL sliding RTP furnace is developed from the split furnace.

2..It can be used for graphene-growing or CVD system for the experiment of the RTP requirement 
3.You can put the constant temperature zone to the field of sample or push the high-temperature zone away from

the sample to accelerate the process of heating &cooling.

Technical Parameter:

1200℃ Sliding Tube Furnace BTF-1200C-SL

Power

3KW

Voltage

AC 220V,50/60HZ

Temperature

Max.temperature 1200ºC(1 hour)
Working temperature ≤1100 ºC

Suggested heating rate

≤15℃/min

Tube size

High purity quartz tube O.D60*1200mm(optional)

Two fibrous ceramic tube blocks are included for blocking heat radiation generated from tube center. (Ceramic blocks must be fully inserted into the furnace chamber before heating).

Heating zone length

Constant zone length

440mm

200mm

Temperature control

*30 programmable segments for precise control of heating rate ,cooling rate and dwell time.

*Built in PID auto tune function with overheating&broken  thermocouple 

broken protection and over temperature protection   

*Alarm allows for operation without attendants.

Temperature accuracy

±1℃

Heating element

Fe-Cr-Al Alloy doped by Mo

Thermocouple

K type

Standard accessories

quartz tube 1 piece,stainless steel sealing flange 1set,silicon sealing ring2sets,high temperature glove1pair,quartz block 2pieces.furnace hook 1piece

Optional accessories

quartz crucible,quartz hook ,manual baffle valve,bellow

 pipe,vacuum gauge ,vacuum gauge  and crucible hook 

Size

620*450*530mm

Net weight

52KG

3 Channels Mass Flowmeter Control GMF-3Z

Net weight

About 40kg

Range ability

100 ,200,500SCCM(standard gas is N2,range ability can be chose)

Working environment

5-45℃

Pressure differential

0.1~0.5 MPa

Max.pressure

3MPa

Mixing tank

φ80*140mm

Accuracy

±1.5% FS 

Low Vacuum Unit

Relative air humidity

≤85%

Working voltage

220V±10%  50~60HZ

Power

1KW

Air bleed rate

8m³/h

Max.vacuum lever

4X10-2Pa

Experiment vacuum

1.0X10-1Pa

Oil capacity

1.1L

Inlet&Outlet port

KF25

Rotation rate

1450rpm

Noise

50dB

Dimension

600×600×600mm

 

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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