TEL:400-0033-603
Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
Copyright 2017 Anhui BEQ Equipment Technology Co., Ltd. 皖ICP备12002778号-1 Powered by: www.300.cn
CVD system with double sliding zone BTF-1200C-II-SL-210
main feature:
Technical Parameters
Power |
· Power rated: 16KW |
Voltage |
· Voltage rated: AC220-380V 50/60HZ |
Working Temperature
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· Max. Temperature: 1200 °C · Continuous working temperature: ≤1100℃ · Max. Heating/colling Rate: ≤20°C /min
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· PID automatic control and auto-tune function. · 30 programmable segments for precise thermal processing. · Built-in protection for the over-heated and broken thermocouple. |
Length of heating zone |
· 500+500mm |
Length of constant zone |
· 200+200mm |
Heating Elements
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· Resistance wire, Fe-Cr-Al Alloy doped by Mo |
Temperature Accuracy |
+/- 1 °C |
Processing tube
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· Φ210*2000mm(optional) · Two tube blocks are included for blocking heat radiation generated from tube center, must be fully inserted into the furnace chamber before heating in the correct position(quartz or ceramic optional).
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Dimensions
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· Furnace size : 2700*1500*1650mm(L*W*H without tube & flange)
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Net Weight |
580kg |
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· KF25 /16 quick clamp flange
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Vacuum Pressure |
· 10^-1pa can be achieved by mechanical pump ·10^-3pa can be reached by molecular pump
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