TEL:400-0033-603
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Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
Copyright 2017 Anhui BEQ Equipment Technology Co., Ltd. 皖ICP备12002778号-1 Powered by: www.300.cn
RTP tube furnace
Main features:
1, This is a RTP fast heating tube furnace heated by an infrared lamp.
2, The diameter of the quartz tube is 90mm, which is suitable for the 3 inch sample test. The furnace tube can be directly slipped out of the heating area to speed up the cooling of the sample, and the temperature can be heated to the target temperature first, then the furnace tube and the sample can be slid into the heating area directly, and the heating speed of the sample is greatly accelerated.
3, Furnace gallbladder uses high density pure alumina polymer light fiber material and vacuum adsorption molding, and the surface is high reflectivity super high temperature protective coating, can keep the lowest energy loss and enhance the stability of high temperature.
4, The heat energy loss can be reduced effectively and the temperature field is uniform. The pneumatic spring support structure enables the operator to operate safely at all angles.
Technical Parameters
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Power
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· Power rated: 10KW |
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Voltage
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· Voltage rated: AC208-240V 50/60HZ |
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Working Temperature
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· Max. Temperature: 1200 °C · Continuous working temperature: ≤1100℃ · Max. Heating/colling Rate: ≤20°C /S |
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· PID automatic control and auto-tune function. · 30 programmable segments for precise thermal processing. · Built-in protection for the over-heated and broken thermocouple.
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Length of heating zone
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· 230mm |
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Heating Elements
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· Resistance wire, Fe-Cr-Al Alloy doped by Mo |
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Temp. Accuracy |
+/- 1 °C |
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Temp. uniformity |
· ±2℃ |
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Processing tube
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· Φ90*400mm |
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Dimensions
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· Furnace size : 1150*530*810mm(L*W*H without tube & flange)
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Net Weight
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50kg |
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Vacuum Pressure
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· 10^-1pa can be achieved by mechanical pump · 10^-3 pa can be reached by molecular pump
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