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Product name
vacuum sublimation equipment BOF-6-130
Affiliate classification
Intermediate level sublimation instrument
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Product description
Product parameters
BOF-6-130 | |||||
item | unit | item | brand&specification | part | specification |
sublimation furnace | body system | Overall size and layout of the equipment | BEQ/Custom type | Device layout | L type |
length | ≤2700mm | ||||
width | ≤1600mm | ||||
height | ≤1800mm | ||||
Part order | outer quartz tube-filter-Main valve-cold trap-Molecular pump | ||||
quartz tube | Pacific/Φ1300*2500*5mm | size | OD130mm,Length2500mm,Thickness5mm | ||
connection | Recessed,Groove height>5mm | ||||
sealing falnges & chamber | BEQ/Custom type | material | bright stainless stee tube ( SUS 304 ) | ||
protection system | BEQ/Custom type | Filter | Single layer metal mesh | ||
Easy to disassemble,clean and maintain | |||||
Cold trap | Vacuum compartment type cold trap design | ||||
Easy to disassemble,clean and maintain(hand can reach into the cold trap) | |||||
Stainless steel / polished inside & outside | |||||
Single outer diameter180-260mm | |||||
Equipment base | BEQ/Custom type | Equipment base, body material | Adopt the square tube skeleton base, attached the movable wheel and the horizontal adjustment foot at the bottom, stainless steel as the countertop.( SUS 304 ) | ||
base height(below heating body) | ≤ 800mm | ||||
base panel | Easy to remove cover plate, cold plate spray | ||||
High temperature furnace system | Thermal field | Arce/Custom type | furnace body | 6 sections above and below, 12 points to detect temperature | |
heating zone=200+200+400+200+300+200mm | |||||
interval section= 10mm | |||||
distance between Heating furnace side shell and outer tube connection>100mm | |||||
temp. | max temp software temp control=600°C, | ||||
max. temp. of hardware>800°C | |||||
Power control module | 40A | ||||
Warming program module | Data can be output, touch screen set temperature program | ||||
Furnace brake system | BEQ/Custom type | Furnace body switch | Manually open | ||
Human touch switch | |||||
Physical control switch | |||||
cooling system | BEQ/Custom type | Cooling fan | High temperature resistant material | ||
Water and electrical requirements | / | electricity | voltage 380V,power 22Kw | ||
water | 5L/min | ||||
gas | 气Pneumatic valve need N2,pressure0.6Mpa | ||||
Man-machine control interface | Human machine hardware system | MCGS | touch screen | 10.4inch | |
Software control | / | function | Touch screen can add screen lock to prevent accidental touch | ||
Integrate the operation of each pneumatic valve of the equipment, the switch of each component, and the setting of the heating system | |||||
automatic mode and manual mode | |||||
vacuum unit | vacuum unit | Main pump | KYKY/FF250/1600G | Molecular pump | FF250/1600G, pumping rate1600L/s |
High vacuum pumping line | BEQ/Custom type | Main pumping line | The vacuum pumping end uses a molecular pump with a diameter of 100mm to directly connect to ensure the high vacuum in the experiment. A plate valve is added in the middle of the diameter straight pipe. | ||
Foreline pump | bsv/BSV30 | mechanical pump | pumping rate30m³/h | ||
Low vacuum pumping line | BEQ/Custom type | side pumping line | The ends of the flapper valve are added with a 16mm diameter thin tube bypass branch to prevent the pumping speed from affecting the direction of molecular diffusion in the initial vacuum, resulting in uneven material. | ||
vacuum degree | / | Low vacuum pump exhaust rate | 2x10^-2torr within 20min in main chamber | ||
High vacuum pump exhaust rate | 5x10^-6torr within 20min in main chamber after turining on Molecular pump | ||||
Pressure test | After reaching the ultimate vacuum (5x10^-6torr), close all valves, less than 2x10^-2torr after 30min |
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