A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Anhui BEQ Equipment Technology Co., Ltd

Hefei Baisi New Materials Research Institute

Hefei Oulai Di Optoelectronics Technology Co., Ltd


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Product name

vacuum sublimation equipment BOF-6-130

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Telephone:+86 173 5409 7574
Product description
Product parameters
item unit item brand&specification part specification
sublimation furnace body system Overall size and layout of the equipment BEQ/Custom type Device layout L type
length ≤2700mm
width ≤1600mm
height ≤1800mm
Part order outer quartz tube-filter-Main valve-cold trap-Molecular pump
quartz tube Pacific/Φ1300*2500*5mm size OD130mm,Length2500mm,Thickness5mm
connection Recessed,Groove height>5mm
sealing falnges & chamber BEQ/Custom type material bright stainless stee tube ( SUS 304  )
protection system BEQ/Custom type Filter Single layer metal mesh
Easy to disassemble,clean and maintain
Cold trap Vacuum compartment type cold trap design
  Easy to disassemble,clean and maintain(hand can reach into the cold trap)
Stainless steel / polished inside & outside
Single outer diameter180-260mm
Equipment base BEQ/Custom type Equipment base, body material Adopt the square tube skeleton base, attached the movable wheel and the horizontal adjustment foot at the bottom,  stainless steel  as the countertop.( SUS 304 )
base height(below heating body) ≤ 800mm
base panel Easy to remove cover plate, cold plate spray
High temperature furnace system Thermal field  Arce/Custom type furnace body 6 sections above and below, 12 points to detect temperature
heating zone=200+200+400+200+300+200mm 
interval section= 10mm
distance between Heating furnace side shell and outer tube connection>100mm
temp. max temp software temp control=600°C,
max. temp. of hardware>800°C
Power control module  40A
Warming program module Data can be output, touch screen set temperature program
Furnace brake system BEQ/Custom type Furnace body switch Manually open
Human touch switch
Physical control switch
cooling system BEQ/Custom type Cooling fan High temperature resistant material
Water and electrical requirements / electricity voltage 380V,power 22Kw
water 5L/min
gas 气Pneumatic valve need N2,pressure0.6Mpa
Man-machine control interface Human machine hardware system  MCGS touch screen 10.4inch
Software control / function Touch screen can add screen lock to prevent accidental touch
Integrate the operation of each pneumatic valve of the equipment, the switch of each component, and the setting of the heating system
automatic mode and manual mode
vacuum unit vacuum unit Main pump KYKY/FF250/1600G Molecular pump FF250/1600G,   pumping rate1600L/s
High vacuum pumping line BEQ/Custom type Main pumping line The vacuum pumping end uses a molecular pump with a diameter of 100mm to directly connect to ensure the high vacuum in the experiment. A plate valve is added in the middle of the diameter straight pipe.
Foreline pump bsv/BSV30 mechanical pump pumping rate30m³/h
Low vacuum pumping line BEQ/Custom type side pumping line The ends of the flapper valve are added with a 16mm diameter thin tube bypass branch to prevent the pumping speed from affecting the direction of molecular diffusion in the initial vacuum, resulting in uneven material.
vacuum degree / Low vacuum pump exhaust rate 2x10^-2torr within 20min in main chamber
High vacuum pump exhaust rate 5x10^-6torr within 20min in main chamber after turining on Molecular pump
Pressure test After reaching the ultimate vacuum (5x10^-6torr), close all valves, less than 2x10^-2torr after 30min


Corresponding parameter set not found, please add it in property template of background
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