Magnetic pull rod type CVD equipment for preparing molybdenum sulfide

main feature

　　The feature of this equipment is that the sulfur powder is placed in the cold zone at the left end, and when the vulcanization process starts, the sulfur powder is pushed into the thermal field by a pull rod type. The control circuit adopts fuzzy PID program control technology, which has high temperature control accuracy, small temperature impact range, reliable performance, and simple and easy operation. The same applies to CVD processes, such as silicon carbide coating, ceramic substrate conductivity testing, controlled growth of ZnO nanostructures, ceramic capacitor (MLCC) atmosphere sintering and other experiments.

　　technical parameter

	tube size	ODΦ25/50/60/80/100*1000mm（OPTIONAL）
	Max. temp	1200℃
	Working temp.	≤1100 ℃
	temp. control	l PID automatic control and auto-tune function. l 30 programmable segments for precise thermal processing. l Built-in protection for the over-heated and broken thermocouple.
	heating rate	≤50℃/min
	heating zone length	200+200mm
	constant zone length	100+100mm
	temp. acuuracy	±1 ℃
	voltage	single phase,220V，50Hz
	Standard range	50sccm、100sccm、200sccm、500sccm； optional

	pumping	10m³/h
	vacuum	5.0X10-1Pa