TEL:400-0033-603
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Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
Copyright 2017 Anhui BEQ Equipment Technology Co., Ltd. 皖ICP备12002778号-1 Powered by: www.300.cn
Front-end preheating molybdenum sulfide preparation equipment
main feature
The front end is equipped with a preheater that can be heated to 400 ° C to assist sulfur powder evaporation, and the rear end is a dual-temperature zone vulcanization furnace. The temperature control is accurate and the operation is simple. It is also equipped with an atmosphere fine-tuning device, which can accurately reflect the gas pressure inside the reaction chamber. The adjustment valve with scale is very practical for low pressure CVD and has good repeatability.
technical parameter
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Sulfur powder preheater
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model：BTF-400C
working temp.：350℃
max. temp.：400℃
max. heating rate：30℃/min
suggested heating rate：10℃/min
temp. control：30 programmable segments for precise thermal processing
voltage：AC220 V
power：800W
temp. accuracy：±1℃
heating element：· Resistance wire, Fe-Cr-Al Alloy doped by Mo
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Vulcanization furnace
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power(KW):3
voltage(V):AC220v 50/60 Hz
max. temp.(℃):1200（1 hour）
working temp.(℃）：1100
heating rate（℃/min）：≤50
tube size（mm）：
Φ50×1200mm
heating zone length（mm）：440mm
（mm）:200mm
temp. control:l PID automatic control and auto-tune function.
l 30 programmable segments for precise thermal processing. l Built-in protection for the over-heated and broken thermocouple.
Temperature Accuracy(℃):±1
Heating Element:Resistance wire, Fe-Cr-Al Alloy doped by Mo
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gas supply system,GMF3Z
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（MFC）
weight：35Kg
overall size：600x600x650mm
Standard range（N2)：50sccm、200sccm、500sccm； （optional）
Accuracy：±1.5%
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vacuum unit,VAU-02
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pumping rate：4L\s
ultiamte vacuum：5X10-1Pa
oil capacity：1.1L
Rotation rate：1450rpm
noise：50dB
overall size:600×600×600mm
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