A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Anhui BEQ Equipment Technology Co., Ltd

Hefei Baisi New Materials Research Institute

Hefei Oulai Di Optoelectronics Technology Co., Ltd


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BTF-1200C-R-S-PECVD/Small rotary type PECVD
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Product name

BTF-1200C-R-S-PECVD/Small rotary type PECVD

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Telephone:+86 173 5409 7574
Product description
Product parameters

  Main features


  The tube of the equipment can be rotated 360 degrees, and the quartz baffle on the inner wall of the tube helps the powder to be turned over to help the sintering to be more uniform;


  It can be tilted from left to right at a large angle to facilitate the discharge. The tilt angle is between 0~35°.


  The device is a fully automated Plasma Enhanced CVD System (PECVD),can achieve continuous sliding temperature zones and to continuously control the temperature and plasma intensity.Equipped with vacuum unit,can realize experiments under low pressure conditions, such as low temperature graphene and carbon nanotube growth. PECVD system enables the entire experimental cavity to be in the glow generation area, and the glow is evenly equivalent. This technique solves the unstable state of the traditional plasma operation, so the range and intensity of ionization. It is a hundred times more than traditional PECVD and solves the problem of uneven material accumulation.


  Used for prepare metal composite graphene material,is the most high-end preparation equipment for metal composite material


  Technical Parameters


Max. Temp


Temperature Controller


PID automatic control and auto-tune function.

30 programmable segments for precise thermal processing.

Built-in protection for the over-heated and broken thermocouple. 

10" LCD touch screen and industrial instrumentation dual temperature control


Heating Elements

·Resistance wire, Fe-Cr-Al Alloy doped by Mo


Temperature Accuracy

+/- 1℃

Processing tube


·Size:Φ25*800(middle sizeΦ50*225)

Furnace tube rotation rate:3~13r/min

Furnace body inclination angle


PE source 

Signal frequency

13.56 MHz±0.005%

Power output range


RF output interface

50 Ω, N-type, female

Power stability


Gas supply system

High precision mass Flowmeter(Range optional)

high precise MFC(optional)



Response accuracy


Response time

Gas characteristics:1~4sec

Electrical characteristics:10sec

Working pressure difference range


Max. pressure



Φ6mmDouble clasp stainless steel joint

Vacuum unit

KF25 series bellows and manual stopper valves


Vacuum up to10-1Pa


The value can be displayed intuitively by the digital display vacuum tester 



Corresponding parameter set not found, please add it in property template of background
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