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PECVD system with preheater & double zones sliding tube furnace /BTF-1200C-II-SL-400C-PECVD
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PECVD system with preheater & double zones sliding tube furnace /BTF-1200C-II-SL-400C-PECVD

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Mailbox:beq02@ahbeq.com;besteq@163.com
Telephone:+86 173 5409 7574
Product description
Product parameters

feature & function

  PECVD is to produced plasma by glow discharge .In the glow discharge plasma, the electron density is 109-1012cm3 and the temperature of the electron gas is 10-100 times higher than that of the ordinary gas molecule, which results in the chemical reaction of the gaseous substance containing the thin film. Thus, a new preparation technique for the growth of thin film materials is developed. By reactive gas discharge, the reaction characteristics of non-equilibrium plasma are effectively utilized, and the energy supply mode of the reaction system is fundamentally changed. The low temperature plasma chemical vapor deposition method has all the advantages of the gas phase method, and the process is simple.

Equipped with front-end preheating furnace, auxiliary solid-state source evaporation, back-end double zones heating furnace, accurate temperature control, simple operation, suitable for vapor deposition, two-dimensional materials, plasma treatment growth process, and also suitable for rapid rise Cooling CVD experiment.

 1.Compared with traditional CVD systems, the growth temperature is lower.

 2.realize rapid heating/cooling rate with sliding furnace

 3.The glow of the whole tube is uniform and equivalent, and grows uniformly

 

 1.heating system

max. temp

1200℃

working temp.

≤1100℃

tube size

Φ50mm(customzable)

insulation material

Alumina fiber

thermocouple

K type

temp. accuracy

±1℃

Temp. control

               PID automatic control with 30 steps programmable

Heating zone

200+200mm

Constant zone

100+100mm

Heating element

                                         Fe-Cr-Al Alloy doped by Mo

voltgae

single phase,220V,50Hz

2、preheater

max. temp

400℃

tube size

Φ50mm(customzable)

insulation material

Alumina fiber

thermocouple

K type

temp. accuracy

±1℃

temp. control

PID automatic control with 30 steps programmable

Heating zone

100mm

Heating element

Fe-Cr-Al Alloy doped by Mo

power

800W

 

3、RF generator

Output power

0W~500W

Max. Reflection power

100W

Signal frequency

13.56MHz±-0.005%

 

4、three channles Gas supply system

connector

double cover stainless steel fitting

Standard range(N2)

50sccm,100sccm、500sccm(optional)

Accuracy

±1.5%FS

 

5、Low vacuum unit

relative air humidity

≤85%

Pumping rate

32m³/h

Vacuum

5X10-1Pa 

 

 

 

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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