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Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
Copyright 2017 Anhui BEQ Equipment Technology Co., Ltd. 皖ICP备12002778号-1 Powered by: www.300.cn
PECVD system with small sliding tube furnace BTF-1200C-S-SL-PECVD
This sliding PECVD system is a modular combined assembly equipment. Consists of manual sliding heat field (multiple temperature regions of thermal field, optional heating length,) vacuum unit, gas supply system, RF power supply plasma excitation system, etc. Each module can be moved independently.
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .
1.heating system
|
max. temp. |
1200℃ |
|
working temp. |
≤1100℃ |
|
tube size |
Φ50mm |
|
insulation material |
Alumina fiber |
|
thermocouple |
K type |
|
temp. accuracy |
±1℃ |
|
temp. control |
l PID automatic control and auto-tune function. l 30 programmable segments for precise thermal processing. l Built-in protection for the over-heated and broken thermocouple. |
|
heating zone length |
230mm |
|
constant zone length |
100mm |
|
heating element |
Resistance wire, Fe-Cr-Al Alloy doped by Mo |
|
voltage |
single phase，220V，50Hz |
2、RF generator
|
Output power |
0W~150W |
|
RF output port |
50 Ω, N-type, female |
|
Power stability |
≤5W |
|
Harmonic component |
≤-50dbc |
|
voltage |
single phase（187V-253V） 50/60HZ |
|
Overall efficiency |
>=70% |
|
Power factor |
>=90% |
|
Cooling |
air cooling |
|
connnector |
double cover stainless steel fitting |
|
standard range（N2) |
50sccm，100sccm、500sccm （optional） |
|
Accuracy |
±1.5%F.S |
|
liner |
±1%F.S |
|
Max. pressure |
3MPa |
4、vacuum unit
|
Rotate rate |
1450rpm |
|
Pumping rate |
10m³/h |
|
ultimate vacuum |
5X10-1Pa |
|
Oil Capacity |
1.1L
|