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Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
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On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
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On January 30, 2019, Best Group ’s annual meeting was successfully held!
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Product name

PECVD system with small sliding tube furnace BTF-1200C-S-SL-PECVD

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Telephone:+86 173 5409 7574
Product description
Product parameters

 

This sliding PECVD system is a modular combined assembly equipment. Consists of manual sliding heat field (multiple temperature regions of thermal field, optional heating length,) vacuum unit, gas supply system, RF power supply plasma excitation system, etc. Each module can be moved independently.

The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials . 

 1.heating system

max. temp.

1200℃

working temp.

≤1100℃

tube size

Φ50mm

insulation material

Alumina fiber

thermocouple

K type

temp. accuracy

±1℃

temp. control

l PID automatic control and auto-tune function.

l 30 programmable segments for precise thermal processing.

l Built-in protection for the over-heated and broken thermocouple. 

heating zone length

230mm

constant zone length

100mm

heating element

Resistance wire, Fe-Cr-Al Alloy doped by Mo

voltage

single phase,220V,50Hz

 

2、RF generator

Output power

0W~150W

RF output port

50 Ω, N-type, female

Power stability

≤5W

Harmonic component

≤-50dbc

voltage

single phase(187V-253V) 50/60HZ

Overall efficiency

>=70%

Power factor

>=90%

Cooling

air cooling  

3、Gas supply system

connnector

double cover stainless steel fitting

standard range(N2)

50sccm,100sccm、500sccm

(optional)

Accuracy

±1.5%F.S

liner

±1%F.S

Max. pressure

3MPa

4、vacuum unit

Rotate rate

1450rpm

Pumping rate

10m³/h

ultimate vacuum

5X10-1Pa

Oil Capacity

 

1.1L

 

 

 

 

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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