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Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
Copyright 2017 Anhui BEQ Equipment Technology Co., Ltd. 皖ICP备12002778号-1 Powered by: www.300.cn
vacuum atmosphere sliding tube furnace BTF-1200C-DSL
main feature
It is a compact and rapid heat treatment tube furnace with quartz tube and vacuum water-cooled flange.
It is specially designed for the annealing of semiconductor or solar cell substrates and uses resistance wires as heating elements. The temperature control bit is a 30-segment programmable temperature controller with a temperature control accuracy of ± 1 ° C. Equipped with a quartz sample holder inside, it can slide freely to achieve a rapid temperature rise and fall function. According to process requirements, electrodes can be introduced into the furnace tube, which is suitable for more data collection needs. The bracket carrying the sample can be directly drawn out of the furnace cavity, which makes it easier and more convenient to enter and exit the sample, and at the same time can test the sample under high temperature conditions.
technical parameter
|
max. temp |
1200℃ |
|
working temp. |
≤1000℃ |
|
tube |
Φ100 |
|
heating zone length |
440mm |
|
insulation material |
Alumina fiber adsorption molding |
|
thermocouple |
K type |
|
accuracy |
±1℃ |
|
heating element |
Fe-Cr-Al Alloy doped by Mo |
|
tube material |
310S |
|
temp. control |
· PID automatic control and auto-tune function. · 30 programmable segments for precise thermal processing. · Built-in protection for the over-heated and broken thermocouple. |
|
suggested Heating Rate |
10min/℃ |
|
structure |
split |
|
voltage |
AC 208-240V Single Phase，50/60 Hz |
|
power |
3KW |
|
overall size |
590×380×500 mm |
|
sealing system |
Furnace tubes are equipped with stainless steel sealing flanges (including precision needle valves, pointer vacuum pressure gauges and hose-type pagoda nozzle joints). The ports can be expanded according to actual use. |
低真空机组
integrat 1 DRV-10 mechanical pump, 1 set of resistance vacuum gauge, and contains supporting parts such as bellows, manual baffle valve, clamp, etc.in one movable box
technical parameter
|
Relative air humidity |
≤85% |
|
voltage |
220V±10% 50~60HZ |
|
pumping rate |
10m3/h |
|
ultimate vacuum |
1.0X10-1Pa |
|
oil capacity |
1.1L |
|
inlet |
KF25 |
|
outlet |
KF25 |
|
rotate rate |
1450rpm |
|
noise |
50dB |
|
overall size |
600×600×650m |
vacuum gauge：
|
Matching Regulation
|
ZJ-52T Resistance gauge |
|
Measuring range |
10 5 ～10 -1 Pa |
|
Measuring channel |
1channel |
|
control range |
5×10 3 ～5×10 -1 Pa |
|
control method |
Relay contact output, load capacity AC220V / 3A (or DC28V / 3A) non-inductive load |
|
power |
90-260V/50Hz或220V ± 10% 50Hz |
|
Power consumption |
20W |
chiller
|
voltage |
AC208-240V 50hz |
|
current |
1.4-2.1A |
|
power |
0.295kw |
|
cooling capacity |
2361btu/h |
|
Water tank capacity |
6L |
|
max flow rate |
10L/min |
|
safety protection |
Compressor over current protection flow alarm, over temperature alarm |
|
weight |
26kg |
|
size |
55x28x43cm |