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A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Anhui BEQ Equipment Technology Co., Ltd

Hefei Baisi New Materials Research Institute

Hefei Oulai Di Optoelectronics Technology Co., Ltd

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Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production RTR-III-80-PE
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Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production RTR-III-80-PE

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Mailbox:beq02@ahbeq.com;besteq@163.com
Telephone:+86 173 5409 7574
Product description
Product parameters

1.Introduction

The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.  

1.Heating furnace

Max. Temp

1200℃

working temp

≤1100℃

tube zie

Φ80mm

insulation material

Alumina, high temperature fiber products

thermocouple

K type

Temperature Accuracy

±1℃

Temp. control

· PID automatic control and auto-tune function.

· 30 programmable segments for precise thermal processing.

· Built-in protection for the over-heated and broken thermocouple. 

Heating Zone Length

200+200+200mm

Heating Element

Fe-Cr-Alloy adopted by Mo

power

single phase，220V，50Hz

2、PE系统

功率输出范围

0W~500W

最大反射功率

100W

射频输出接口

50 Ω, N-type, female

功率稳定度

≤5W

谐波分量

≤-50dbc

供电电压

单相交流（187V-253V） 频率50/60HZ

整机效率

>=70%

功率因素

>=90%

冷却方式

强制风冷

3、三路质子流量控制系统

连接头类型

双卡套不锈钢接头

标准量程（N2)

200sccm，500sccm、1000sccm

（可根据用户要求定制）

准确度

±1.5%F.S

线性

±1%F.S

重复精度

±0.2%F.S

响应时间

气特性：1～4 Sec，电特性：10 Sec

工作压差范围

0.1～0.5 MPa

最大压力

3MPa

接口

Φ6,1/4''

显示

4位数字显示

工作环境温度

5~45高纯气体

压力真空表

－0.1～0.15 MPa, 0.01 MPa/格

截止阀

Φ6

内外双抛不锈钢管

Φ6

 

4、低真空机组

空气相对湿度

≤85%

工作环境

5℃～40℃

工作电电压

220V±10%  50~60HZ

功率

1KW

抽气速率

10m³/h

极限真空

5X10-1Pa

工作压力范围

1.01325X105～1.33X10-2Pa

耐压值

0.03MPa

容油量

1.1L

进气口口径

KF25

排气口口径

KF25

噪音

50dB

连接方式

采用波纹管，手动挡板阀与波纹管相连

 

 

 

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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