rotary CVD system with

Main features

The tube of the device can rotate 360°, which helps the sintering of the powder to be more uniform, can be inclined at a large angle, and is convenient for feeding and discharging. The inclination angle is  Between 0-35°

Structure specification:consist of Liquid gasification , Heating system, feeding system, discharging system, gas control system, low vacuum system, furnace tube rotation system, electronically controlled operating system

Liquid gasification：Gasification of the liquid can reach 200 degrees

HEATING SISTEM:

The heating cavity adopts alumina fiber products, and its extremely low thermal conductivity and specific heat capacity ensure rapid heating and low heat storage of the furnace, and is particularly suitable for material process research of scientific research units. The heating element is heated by a resistance wire and is suitable for medium and low temperature heating systems.

Temperature control system adopts the classic closed-loop negative feedback control system. The temperature control instrument uses intelligent program temperature adjustment instrument temperature control and power modulator control; the load uses small voltage and large current control, which greatly improves the life of the heating element. The temperature measuring element adopts a K type thermocouple. The single-loop temperature controller can self-tune the PID parameters without the intervention of the operator. It can adjust the output signal according to the rising and lowering requirements of different temperature curves. At the same time, the system sets the over-temperature, under-temperature and break-off alarm protection functions. Reduced the need for operator experience.

 feeding system

The feeding system speed is continuously adjustable. When the feeding is stopped and the furnace body is tilted to the maximum, the material will not leak from the outside of the feeding system. The feeding system is easy to disassemble, and the material can be manually fed after disassembly, and the equipment can operate normally.

discharging system

can automatically discharge when the furnace body is inclined and discharged.

 gas control system

The four gases can be controlled to mix and match according to different flow rates, and can also be independently controlled. The mass flow meter is installed in a sealed movable cabinet, and is composed of a super clean double-throw stainless steel tube and a precision double ferrule joint.

 low vacuum system

Equipped with a vacuum mechanical pump that can be vacuumed to allow the unit to react in a vacuum environment.

 furnace tube rotation system

The furnace tube can be rotated at a constant speed of 360°, the rotation speed is continuously adjustable from 0 to 60 r/min, and it can be operated for a long time at a speed of 60 r/min.(＞24h）