PECVD with double zones sliding furnace

Set vacuum unit, gas supply system, RF source, automatic propulsion, heating furnace in on.All the controls are integrated into the touch screen control interface to make the device more intelligent and easy to operate.Two temperature regions can provide better experimental conditions for CVD

Main parameter：

Furnace：

Max. tem：1200°C

  Heating zone length：200+200mm

  Constant zone length：200mm

  Tem. control：PID automatic control with 30 steps programmable，Operation interface is 7 "industrial control computer

  Tube size：Ø25，,Ø50，Ø60，,Ø80，,Ø100（customizable）

PE source:   

Signal frequency：13.56 MHz±0.005%

Power output range：0-500W

Max. reflection power:100W

RF output interface：50 Ω, N-type, female

Power stability ：≤5W

Gas supply system:

Accurate control of gas flow with high precision mass Flowmeter；

Mass Flowmeter reference range（N2)：100sccm、200sccm 500sccm （optional）

Accuracy：±1.5%

Repeatability precision ：±0.2%

Working pressure difference range：0.1～0.5 MPa

Max. pressure：3MPa

Vacuum unit：

KF25 series bellows and manual stopper valves；

Vacuum up to10-3torr；

The value can be displayed intuitively by the digital display vacuum tester