A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Anhui BEQ Equipment Technology Co., Ltd

Hefei Baisi New Materials Research Institute

Hefei Oulai Di Optoelectronics Technology Co., Ltd


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Product name

PECVD with double zones sliding furnace

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Telephone:+86 173 5409 7574
Product description
Product parameters

Set vacuum unit, gas supply system, RF source, automatic propulsion, heating furnace in on.All the controls are integrated into the touch screen control interface to make the device more intelligent and easy to operate.Two temperature regions can provide better experimental conditions for CVD


Main parameter:


Max. tem:1200°C

  Heating zone length:200+200mm

  Constant zone length:200mm

  Tem. control:PID automatic control with 30 steps programmable,Operation interface is 7 "industrial control computer

  Tube size:Ø25,,Ø50,Ø60,,Ø80,,Ø100(customizable)


PE source:   

Signal frequency:13.56 MHz±0.005%

Power output range:0-500W

Max. reflection power:100W

RF output interface:50 Ω, N-type, female

Power stability :≤5W


Gas supply system:

Accurate control of gas flow with high precision mass Flowmeter;

Mass Flowmeter reference range(N2):100sccm、200sccm 500sccm (optional)


Repeatability precision :±0.2%

Working pressure difference range:0.1~0.5 MPa

Max. pressure:3MPa


Vacuum unit:

KF25 series bellows and manual stopper valves;

Vacuum up to10-3torr;

The value can be displayed intuitively by the digital display vacuum tester



Corresponding parameter set not found, please add it in property template of background
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