Three zones intelligent PECVD system,PECVD-III-500A

   Product introduction: This equipment is mainly used for the growth and preparation of graphene in experiments and pilots. At the same time, this equipment can be used for the growth of carbon nanotubes. High-quality transparent conductive films can be prepared for use in mobile phone touch screens, tablet computers, smart wearables, sensors and other fields.

    The heating cavity is made of alumina fiber products, and its extremely low thermal conductivity and specific heat capacity ensure the rapid heating of the furnace and low heat storage, and is particularly suitable for the research of material technology in scientific research units. The heating element is heated by resistance wire, which is conducive to the uniform distribution of the temperature field in the furnace. The high-temperature vacuum resistance furnace temperature control system uses a classic closed-loop negative feedback control system. The temperature control instrument uses intelligent program temperature adjustment instrument temperature control and power modulator control; the load is controlled by small voltage and high current, thereby greatly improving the life of the heating element The temperature measuring element adopts K-type thermocouple. The single loop temperature controller can set PID parameters without operator intervention, and can adjust the output signal according to the rising and cooling requirements of different temperature curves. Reduced the requirements for the operator's experience, key electrical components using high-quality imported products to achieve high performance, maintenance-free, improve the reliability of equipment quality.            

 2、PE source

3、3 channels MFC

4、Vacuum unit