A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Three zones intelligent PECVD system,PECVD-III-500A
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Three zones intelligent PECVD system,PECVD-III-500A

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Mailbox:beq02@ahbeq.com;besteq@163.com
Telephone:+86 173 5409 7574
Product description
Product parameters

   Product introduction: This equipment is mainly used for the growth and preparation of graphene in experiments and pilots. At the same time, this equipment can be used for the growth of carbon nanotubes. High-quality transparent conductive films can be prepared for use in mobile phone touch screens, tablet computers, smart wearables, sensors and other fields.

    The heating cavity is made of alumina fiber products, and its extremely low thermal conductivity and specific heat capacity ensure the rapid heating of the furnace and low heat storage, and is particularly suitable for the research of material technology in scientific research units. The heating element is heated by resistance wire, which is conducive to the uniform distribution of the temperature field in the furnace. The high-temperature vacuum resistance furnace temperature control system uses a classic closed-loop negative feedback control system. The temperature control instrument uses intelligent program temperature adjustment instrument temperature control and power modulator control; the load is controlled by small voltage and high current, thereby greatly improving the life of the heating element The temperature measuring element adopts K-type thermocouple. The single loop temperature controller can set PID parameters without operator intervention, and can adjust the output signal according to the rising and cooling requirements of different temperature curves. Reduced the requirements for the operator's experience, key electrical components using high-quality imported products to achieve high performance, maintenance-free, improve the reliability of equipment quality.            

 

Max. temp

1200℃

working temp

≤1100℃

tube size

Φ100mm

insulation material

alumina fiber products

thermocouple

K type

Accuracy

±1℃

Temperature control

PID automatic control with 30 steps programmable,Operation interface is 7 "industrial control computer 

Heating zone length

200+200+200mm

Constant zone length

400mm

Heating element

Fe-Cr-Alloy adopted by Mo

voltage

single phase,220V,50Hz

 2、PE source

Power output range

0W~500W

Max. reflection power

100W

RF output interface

50 Ω, N-type, female

Power stability

≤5W

cooling

                   air

3、3 channels MFC

Connector style

双卡套不锈钢接头

Standard range(N2)

50sccm,100sccm、500sccm(optional)

Accuracy

±1.5%F.S

Linearity

±1%F.S

 

 

Working pressure range

0.1~0.5 MPa

Max.pressure

3MPa

 

 

4、Vacuum unit

Relative air humidity 

≤85%

Rotation rate

                 1450rpm

pumping rate

10m³/h

ultimate vacuum

5X10-1Pa

Noise

                 50dB

Oil capacity

1.1L

Inlet/Outlet

 

 

                 KF25

 

 

 

 

 

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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