A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Copyright 2017  Anhui BEQ Equipment Technology Co., Ltd.   皖ICP备12002778号-1   Powered by: www.300.cn

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Product name

Non-gaseous source chemical vapor deposition system BTF-1200C-S-SL-CVD

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Mailbox:beq02@ahbeq.com;besteq@163.com
Telephone:+86 173 5409 7574
Product description
Product parameters

main feature

  consists of electric sliding tube furnace, three channles gas supply system, vacuum and filtration system, precursor bubbling device, gas preheating device, software control and other parts. Suitable for precursors that are non-gaseous sources, such as solid or liquid precursors, the filling temperature of the precursor can reach 400 ° C, and the temperature can be adjusted independently. After the solid or liquid precursor is evaporated at a certain temperature, it is brought into the reaction area through inert gas Some CVD reactions.

structure

1.   The intake and exhaust of the left and right ends can be switched between each other; improve the uniformity of the coating on the substrate;

2.    The bottom of the furnace body can be moved horizontally on the guide rail under the drive of the motor, and the moving speed can be set according to the process requirements. 

3.    Using touch screen and industrial control computer automatic control, parameter setting and operation are intuitive and convenient, and parameter automatic record keeping.

4.   The gas supply system can be equipped with several mass flow meters according to the customer's experimental needs. The range of the flow meter is optional. The vacuum system can also be equipped with various vacuum pumps according to the customer's needs.

technical parameter

heating system

max. temp.

1200

working temp.

1100

chamber size

Φ40*800mm(diameter customzable)

insulation material

High purity alumina fiber

thermocouple

K type

Accuracy

±1

Temperature control

30 programmable segments for precise control of heating rate ,cooling rate and dwell time

10" touch screen built-in PLD

heating zone length

150mm

constant zone length

70mm

heating element

                  Fe-Cr-Alloy adopted by Mo

voltage

220V50Hz

power

2KW

 

3 channels MFC

Connector style 

Φ6mmDouble cutting ferrule stainless steel connector

Standard range(N2)

100sccm100sccm200sccm;(OPTIONAL

Accuracy

±1.5%

Linearity

±0.51.5%

Max.pressure

                                   3MPa

Working pressure range

                               0.1~0.5 MPa

Vacuum unit

Inlet/Outlet caliber

                                   KF25

pumping rate

10m³/h

ultimate vacuum

5X10-1Pa

Oil capacity

                                      1.1L

Rotation rate

 

                                 1450rpm

 

 

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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