A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Copyright 2017  Anhui BEQ Equipment Technology Co., Ltd.   皖ICP备12002778号-1   Powered by: www.300.cn

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BTF-1200C-R-PECVD/Plasma enhanced rotational PECVD system
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BTF-1200C-R-PECVD/Plasma enhanced rotational PECVD system

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Mailbox:beq02@ahbeq.com;besteq@163.com
Telephone:+86 173 5409 7574
Product description
Product parameters

  Main features:

  The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials . 

  Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to 35 degree.

  Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.

 

  

 Technical Parameters

 

Furnace

Max. Tem

1200℃

Heating zone length

440mm

Constant zone length

200mm



Temperature Controller

 

lPID automatic control and auto-tune function.

l30 programmable segments for precise thermal processing.

lBuilt-in protection for the over-heated and broken thermocouple. 

lOperation interface is 7 "industrial control computer

Heating Elements

·Resistance wire, Fe-Cr-Al Alloy doped by Mo

Temperature Accuracy

+/- 1℃

Processing tube

Size:Φ60*420+Φ100*360+Φ60*420mm

Furnace tube rotation rate:3~13r/min

Furnace body inclination angle

0~35°(adjustable)

RF generator 

Signal frequency

13.56 MHz±0.005%

Power output range

0-500W

RF output interface

50 Ω, N-type, female

Power stability

≤5W

Gas supply system

High precision mass Flowmeter(Range optional)

 

Accuracy

±1.5%

Response accuracy

 

·±0.2%

Response time间

 

Gas characteristics:1~4sec

Electrical characteristics:10sec

Working pressure difference range

0.1~0.5MPa

Max. pressure

 

·3MPa

Connection 

Φ6mmDouble clasp stainless steel joint

 

Vacuum unit

KF25 series bellows and manual stopper valves

 

Vacuum up to10-1Pa

 

The value can be displayed intuitively by the digital display vacuum tester  

 

 

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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