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Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
Copyright 2017 Anhui BEQ Equipment Technology Co., Ltd. 皖ICP备12002778号-1 Powered by: www.300.cn
BTF-1200C-R-PECVD/Plasma enhanced rotational PECVD system
Main features:
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .
Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to 35 degree.
Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.
Technical Parameters
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Furnace |
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Max. Tem |
1200℃ |
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Heating zone length |
440mm |
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Constant zone length |
200mm |
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lPID automatic control and auto-tune function. l30 programmable segments for precise thermal processing. lBuilt-in protection for the over-heated and broken thermocouple. lOperation interface is 7 "industrial control computer |
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Heating Elements |
·Resistance wire, Fe-Cr-Al Alloy doped by Mo |
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Temperature Accuracy |
+/- 1℃ |
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Processing tube |
Size：Φ60*420+Φ100*360+Φ60*420mm Furnace tube rotation rate：3~13r/min |
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Furnace body inclination angle |
0~35°（adjustable） |
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RF generator |
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Signal frequency |
13.56 MHz±0.005% |
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Power output range |
0-500W |
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RF output interface |
50 Ω, N-type, female |
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Power stability |
≤5W |
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Gas supply system |
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High precision mass Flowmeter（Range optional） |
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Accuracy |
±1.5% |
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Response accuracy
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·±0.2% |
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Response time间
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Gas characteristics：1～4sec Electrical characteristics:10sec |
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Working pressure difference range |
0.1～0.5MPa |
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Max. pressure
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·3MPa |
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Connection |
Φ6mmDouble clasp stainless steel joint
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Vacuum unit |
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KF25 series bellows and manual stopper valves |
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Vacuum up to10-1Pa |
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The value can be displayed intuitively by the digital display vacuum tester |
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