A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Anhui BEQ Equipment Technology Co., Ltd

Hefei Baisi New Materials Research Institute

Hefei Oulai Di Optoelectronics Technology Co., Ltd


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constant feeding & discharging Plasma rotary CVD system-BTF-1200C-RP-PECVD
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Product name

constant feeding & discharging Plasma rotary CVD system-BTF-1200C-RP-PECVD

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Product description
Product parameters

  The device is a fully automated Plasma Enhanced CVD System (PECVD) with continuous temperature control and Plasma strength. Equipped with a vacuum system that can be used under low pressure conditions. The PECVD system enables the entire experimental chamber to be in the glow generation area. The light is uniform and equivalent, which solves the unstable operation of the traditional plasma. The tube of the device can rotate 360°, which helps the sintering of the powder to be more uniform, can be inclined at a large angle, and is convenient for feeding and discharging. The inclination angle is  Between 0-35°, all pipeline materials passing through  are made of non-metallic materials. For example, the inlet and outlet chambers are made of quartz, and the push rods are made of quartz and PTFE.


Technical Parameter

Heating system


VoltageAC220V  50/60Hz

Max. Temp1200c

Working temp.1100c

Tube SizeØ60*420*2+Ø100*360mm*

Furnace tube rotation rate0~60r/min

Furnace body inclination angle0~35°

Temp accuracy±1℃

Temp controlPID automatic control with 30 steps programmable

Operation interface10LCD touch screen control

Heating zone length200mm+200mm

Constant zone length250mm

Plasma system

The system generates plasma by means of glow discharge. In the glow discharge plasma, the electron density is high, and the reaction characteristics of the non-equilibrium plasma are effectively utilized by the reaction gas discharge, which fundamentally changes the energy supply mode of the reaction system.

Feeding system

The speed is continuously adjustable. When the feeding is stopped and the furnace body is tilted to the maximum, the material will not leak . The feeding system is easy to disassemble, and the material can be manually fed after disassembly, and the equipment can operate normally.

Discharge system:

The discharging system can automatically discharge when the furnace body is inclined and discharged.

Gas control system

The gas control system can control the mixing ratio of the two gases according to different flow rates, and can also be independently controlled. The mass flow meter is installed in a sealed movable cabinet, which is composed of super clean stainless steel tube and the precision double ferrule joint.

Low vacuum system

Equipped with a vacuum mechanical pump that can be vacuumed to allow the unit to react in a vacuum environment.

Separation system:


the system allows the separation of gas and material during the protection of the inflator or when vacuuming.

filtering system:

The system prevents material from entering the vacuum pump and ensures proper operation of the vacuum pump.

Furnace tube rotation system:

Allows the  tube to rotate 360° at a constant speed. The rotation speed is continuously adjustable from 0 to 60 r/min for a long time.














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