A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Anhui BEQ Equipment Technology Co., Ltd

Hefei Baisi New Materials Research Institute

Hefei Oulai Di Optoelectronics Technology Co., Ltd


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Roll to roll pecvd system for constant graphene film production RTR-III-80
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Product name

Roll to roll pecvd system for constant graphene film production RTR-III-80

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Telephone:+86 173 5409 7574
Product description
Product parameters

Main feature                         

Ø Under the vacuum condition , a RF power supply acts on the rare gas in the vacuum chamber to form the plasma equivalent glow effect ( PECVD patent of our company ) , and the field energy of the plasma replaces the thermal energy , so that the growth temperature of the graphene is reduced , and the process conditions are improved .


Ø Achieve growth of high quality graphene thin films by controlling nucleation and growth of graphene


Ø In this method, copper foil is used as a base, motor drives copper foil to move under closed growth condition, and then it passes through the first temperature zone (annealed area). Graphene will deposit on the copper foil on the second, third temperature zone (growth area)and tighten to the roll by the cooling device  


Ø With the advantages of rapid cooling and continuous growth, and can be used for large-scale growth of graphene with large area and high quality.








Furnace input AC 208-240V ,50/60 Hz



Working Temperature


· Max. Temperature: 1200 °C  

· Continuous working temperature: 1100 °C


Heating Zone


· Heating Zone Length:           7.87" ( 200+200+200mm)

· Constant Temperature Zone:  15.74 " (400mm. +/-  1ºC )


Heating Elements


Fe-Cr-Al Alloy doped by Mo

Processing Tube

· High purity quartz tube:  100 mm OD x 1700 mm Length


Copper foil width



Copper foil running rate




RF Signal frequency



Power output



Vacuum Dgree






Application Note


· Equipped with high precision mass flowmeter in the gas system,can control the gas flow


· Gas can mix sufficient in required proportion in the  static mixing chamber,




Corresponding parameter set not found, please add it in property template of background
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