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Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
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Product name
gas control system with one MFC
Affiliate classification
Gas supply system
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Product description
Product parameters
gas control system with one MFC(GMF-1Z)
The gas supply system can a kind of gas, and a gas washing device can be added according to the experimental requirements. The mass flow meter is installed in a sealed movable cabinet, which is connected by an ultra-clean double-throw stainless steel tube and a precision double ferrule joint composition. This equipment forms a CVD system with various vacuum tube furnaces and vacuum units of BEQ brand.
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gas control system with one MFC
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Max voltage
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185~245V/50Hz
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Max. power
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18W
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range
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500SCCM；（Nitrogen calibration, range optional)
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working temp.
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5~45 ºC
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Working pressure difference
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0.1～0.5 MPa
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max. pressure
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3MPa
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Measuring range
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-0.1~0.15 MPa（0.01 MPa/grid）
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Gas characteristics
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gas：1～4 Sec，electricity：10 Sec
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Repeat accuracy
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±0.2%
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accuracy
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±1.5% FS
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needle valve
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stainless steel 316
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Gas mixing tank
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Φ80×120mm
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Shut-off valve
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Φ6mm stainless steel 316
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size
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600*600*650mm
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