A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
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Product name

gas control system with 5 MFC

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Mailbox:beq02@ahbeq.com;besteq@163.com
Telephone:+86 173 5409 7574
Product description
Product parameters

  gas control system with 5 MFC GMF-5Z

   The gas supply system can control the mixing of three gases at different flow rates. It can also be equipped with a scrubbing device according to the experimental needs. The mass flow meter is installed in a sealed movable cabinet. It is made of ultra-clean double-throw stainless steel tubes. It is composed of precision double ferrule joints. This equipment forms a CVD system with various vacuum tube furnaces and vacuum units of BEQ brand.

 

Configuration components
Technical Parameters
mfc
voltage
185~245V 50HZ
max. power
18W
range
50sccm,100sccm,200sccm,200sccm,500sccm(Nitrogen calibration,range optional)
working temp.
5~45℃

Working pressure range

0.1~0.5MPa
max. pressure
3MPa

Accuracy

±1.5% FS
Mechanical pressure gauge

Pressure vacuum gauge 

-0.1~0.15 MPa(0.01 MPa/grid)
needle valve
stainless steel 316
Gas mixing tank
Φ80×120mm
Shut-off valve
Φ6mm,stainless steel 316
size
600×600×650 mm

 

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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