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Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
Copyright 2017 Anhui BEQ Equipment Technology Co., Ltd. 皖ICP备12002778号-1 Powered by: www.300.cn
gas control system with 3 MFC
gas control system with 3 MFC GMF-3Z
The gas supply system can control the mixing of three gases at different flow rates. It can also be equipped with a scrubbing device according to the experimental needs. The mass flow meter is installed in a sealed movable cabinet. It is made of ultra-clean double-throw stainless steel tubes. It is composed of precision double ferrule joints. This equipment forms a CVD system with various vacuum tube furnaces and vacuum units of BEQ brand.
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Configuration components
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technical parameter
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MFC
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Voltage
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185~245V 50HZ
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Max. power
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18W
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range
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100sccm，200sccm，500sccm（Nitrogen calibration,range optional）
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working temp.
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5~45℃
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Working pressure range |
0.1~0.5MPa
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max. pressure
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3MPa
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Accuracy |
±1.5% FS
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Mechanical pressure gaugene
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needle valve
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stainless steel 316
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Gas mixing tank
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Φ80×120mm
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Shut-off valve
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Φ6mm,stainless steel 316
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size
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600×600×650 mm
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