TEL:400-0033-603
2
1
Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
Copyright 2017 Anhui BEQ Equipment Technology Co., Ltd. 皖ICP备12002778号-1 Powered by: www.300.cn
one channel float flow meter one channel mass flow meter
main feature
The gas supply system can control the mixing of the two gases at different flow rates. It can also be equipped with a scrubbing device according to the experimental requirements. The mass flow meter is installed in a sealed movable cabinet. It is made of ultra-clean double-throw stainless steel tubes. It is composed of precision double ferrule joints. This proportioner is suitable for low-pressure small-flow, multi-gas single / mixed continuous gas supply system. It is especially convenient for switching between multiple gases without causing the atmosphere to enter the heating tube. Gas pressure and flow data are intuitive and readable on the same plane, beautiful in appearance, practical and easy to operate. The flow rate is displayed accurately and the gas consumption can be effectively controlled. All the instruments and valves are connected by a union, which is convenient for maintenance and disassembly. This equipment forms a CVD system with various vacuum tube furnaces and vacuum units of BEQ brand.
technical parameter
|
model
|
GMF-1Z-1F
|
|
|
Float flowmeter
|
10-100ml/min
16-160ml/min
25-250ml/min
（range optional）
|
|
|
质量流量控制器
|
voltage：
|
185~245V 50HZ
|
|
Max. output power：
|
18W
|
|
|
standard range：
|
100sccm 、200sccm 、500sccm
（Calibrated with nitrogen with optional range）
|
|
|
working temp.：
|
5~45℃
|
|
|
Working pressure range：
|
0.1~0.5MPa
|
|
|
Max.pressure |
3MPa
|
|
|
Accuracy |
±1.5% FS
|
|
|
Mechanical pressure gauge
|
Pressure vacuum gauge |
-0.1~0.15 MPa（0.01 MPa/grid）
|
|
Needle valve
|
stainless steel 316
|
|
|
Gas tank
|
Φ80×120mm
|
|
|
Shut-off valve
|
Φ6mm stainless steel 316
|
|
|
size
|
600×600×650 mm
|
|