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Anhui BEQ Equipment Technology Co., Ltd
Hefei Baisi New Materials Research Institute
Hefei Oulai Di Optoelectronics Technology Co., Ltd
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gas control system with 4 MFC and Bubbler GMF-4Z
gas control system with 4 MFC and Bubbler GMF-4Z GMF-4Z
main feature
1.The gas supply is suitable for low-pressure small-flow, single gas / mixed continuous gas supply systems. It is especially convenient for switching between multiple gases without causing the atmosphere to enter the heating tube.
2.Gas pressure and flow data are intuitive and readable on the same plane, with beautiful appearance, practicality and easy operation.
3.All the instruments and valves are connected by a union, which is convenient for maintenance and disassembly.
4.The main function of the bubbler is to inject gas such as hydrogen, nitrogen or argon as the carrier gas output from the gas supply system into the liquid source stainless steel bubbler (bubbler) to carry the required various non-corrosive liquid sources. Steam, and transport it to the reaction chamber, participate in the reaction at high temperature to form the final required film or complete the corresponding chemical reaction.
5.The equipment is widely used in various CVD, catalytic reaction and activation experiments using non-corrosive liquid source steam.
Technical Parameters
Configuration components |
Technical Parameters |
|
MFC |
voltage |
185~245V 50HZ |
max. power |
18W |
|
range |
100sccm,200sccm,200sccm,500sccm(Nitrogen calibration,range optional) |
|
working temp. |
5~45℃ |
|
Working pressure range |
0.1~0.5MPa |
|
max. pressure |
3MPa |
|
Accuracy |
±1.5% FS |
|
Mechanical pressure gauge |
Pressure vacuum gauge |
-0.1~0.15 MPa(0.01 MPa/grid) |
needle valve |
stainless steel 316 |
|
Gas mixing tank |
Φ80×120mm |
|
Shut-off valve |
Φ6mm,stainless steel 316 |
|
size |
600×600×650 mm |