A delegation from the Economic Development Zone of Feixi County investigated the company's products and scientific research results
Recently, Lu Ge, member of the Standing Committee of the Feixi County Party Committee, deputy head, and first secretary of the Economic Development Zone of Feixi County, visited the company. General Manager Kong Lingjie warmly received and accompanied the inspection.
Leaders of Hefei Investment Promotion Bureau surveyed the Best R & D Center
On March 8, 2019, Zhu Shengli, deputy secretary general of the Hefei Municipal Government and director of the Investment Promotion Bureau, and his party visited the product research and development center of Best Group. Research.
Best Group 2018 Highlights
On January 30, 2019, Best Group ’s annual meeting was successfully held!
The Fifth National Energy Storage Science and Technology Conference
From October 26 to 28, 2018, the Fifth National Energy Storage Science and Technology Conference was held at Huazhong University of Science and Technology.
  • 2


  • 1


Anhui BEQ Equipment Technology Co., Ltd

Hefei Baisi New Materials Research Institute

Hefei Oulai Di Optoelectronics Technology Co., Ltd


Leave your valuable advice

We will reply to you first time

Copyright 2017  Anhui BEQ Equipment Technology Co., Ltd.   皖ICP备12002778号-1   Powered by: www.300.cn

gas control system with 4 MFC and Bubbler GMF-4Z
Page view:
Product name

gas control system with 4 MFC and Bubbler GMF-4Z

Affiliate classification
Buy now
Add to Cart
Online consultation
Telephone:+86 173 5409 7574
Product description
Product parameters

  gas control system with 4 MFC and Bubbler GMF-4Z  GMF-4Z

  main feature

  1.The gas supply is suitable for low-pressure small-flow, single gas / mixed continuous gas supply systems. It is especially convenient for switching between multiple gases without causing the atmosphere to enter the heating tube.

  2.Gas pressure and flow data are intuitive and readable on the same plane, with beautiful appearance, practicality and easy operation.

  3.All the instruments and valves are connected by a union, which is convenient for maintenance and disassembly.

  4.The main function of the bubbler is to inject gas such as hydrogen, nitrogen or argon as the carrier gas output from the gas supply system into the liquid source stainless steel bubbler (bubbler) to carry the required various non-corrosive liquid sources. Steam, and transport it to the reaction chamber, participate in the reaction at high temperature to form the final required film or complete the corresponding chemical reaction.

  5.The equipment is widely used in various CVD, catalytic reaction and activation experiments using non-corrosive liquid source steam.

 Technical Parameters

Configuration components

Technical Parameters



185~245V 50HZ

max. power



100sccm,200sccm,200sccm,500sccm(Nitrogen calibration,range optional)

working temp.


Working pressure range


max. pressure



±1.5% FS

Mechanical pressure gauge

Pressure vacuum gauge 

-0.1~0.15 MPa(0.01 MPa/grid)

needle valve

stainless steel 316

Gas mixing tank


Shut-off valve

Φ6mm,stainless steel 316


600×600×650 mm


Corresponding parameter set not found, please add it in property template of background
Previous article
Next article