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Anhui BEQ Equipment Technology Co., Ltd.

Hefei Baisi New Materials Research Institute

Hefei Oulai Di Optoelectronics Technology Co., Ltd




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  • Name: Single zone vertical tube furnace(BTF-1200C-VT)

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Main features:


Atmosphere injector design inside tube can directly inject the necessary atmosphere onto materials to help react more fully.


Sample put horizontally on the inner tube can let gas flow into outer/inner tube simultaneously, and horizontal sample is helpful for film growth& electrode test, with evener temperature.


The device can also make oxide crystals grow, and anneal, etc.


Technical Parameters




·Power rated: 3KW




·Voltage rated:  AC208-240V 50/60HZ


Working Temperature


·Max. Temperature: 1200 °C

·Continuous working temperature: ≤1100

·Recommended heating Rate: 15°C /min


Temperature Controller


·PID automatic control and auto-tune function.

·30 programmable segments for precise thermal processing.

·Built-in protection for the over-heated and broken thermocouple. 

Length of heating zone


Length of constant zone



Heating Elements


·Resistance wire, Fe-Cr-Al Alloy doped by Mo


Temperature Accuracy

+/- 1 °C

Processing tube


·Tube sizeΦ50/60/80/100*1000mm(optional




·Furnace size: 590*380*500mm(L*W*H without tube & flange)

Net Weight


Shipping Weight


Vacuum Flange

· Special designed flanges


Vacuum Pressure


·133torr can be achieved by mechanical pump

·10^-6 torr can be reached by molecular pump                                                                                                                                


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