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Product name
铜铟镓硒太阳能薄膜电池专用炉
Affiliate classification
PECVD System
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Product description
Product parameters
主要特点
这是一款针对太阳能硒化设计的专用炉,炉体上端腔体可以实现离子增强硒化功能,利用上下腔体内的压差实现硒化气体均匀扩散乘积在基体表面。上腔体温度调节范围50-600度,等离子强度0-500W可调,下腔体0-800度可调。可以定制下腔体连续工作。
技术参数
功率 |
上炉体:1.5kw |
下炉体:5kw |
|
射频功率 |
0-500W可调 |
炉膛尺寸 |
上腔体:100*100*100mm |
下腔体:240*300*100mm |
|
炉膛温度 |
上腔体:50-600度可调 |
下腔体:50-800度可调 |
|
重量 |
220Kg |
外型尺寸 |
1200*900*1600mm |
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射频电源150W/300W/500W
辉光等效等离子PECVD系统 BTF-1200C-PECVD
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